Thin nanocrystalline diamond films deposited by LaPlas-CVD at atmospheric pressure

Autor:	Knut Partes, Frank Vollertsen, Alexej Schubnov
Rok vydání:	2009
Předmět:	Materials science Atmospheric pressure Mechanical Engineering Material properties of diamond Metallurgy Diamond Plasma engineering.material Laser Industrial and Manufacturing Engineering Nanocrystalline material law.invention law engineering Crystallite Thin film
Zdroj:	Production Engineering. 4:9-14
ISSN:	1863-7353 0944-6524
DOI:	10.1007/s11740-009-0194-9
Popis:	In this study possibilities are presented how a laser plasma CVD process (LaPlas) can be modified in order to generate nanocrystalline diamonds. With the LaPlas process it is possible to deposit diamond coatings on surfaces. It can be shown that the crystallite size can be modified towards smaller grains. The crystallite size was reduced below 1 μm. An applied cutting force test of some coatings shows the resulting performance.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cd071f817e2b0c534d23dcae65d2e474 https://doi.org/10.1007/s11740-009-0194-9 Zobrazit plný text záznamu Full text from SpringerLink