Pulsed-laser ablation and deposition of advanced materials (Plenary Paper)

Autor:	Maria Dinescu, D. G. Matei, I. Vrejoiu, Martin Peruzzi, Dieter Bäuerle, Johannes D. Pedarnig
Rok vydání:	2004
Předmět:	Materials science business.industry medicine.medical_treatment Analytical chemistry Ablation Piezoelectricity Pulsed laser deposition Carbon film visual_art Physical vapor deposition visual_art.visual_art_medium medicine Deposition (phase transition) Optoelectronics Ceramic Thin film business
Zdroj:	High-Power Laser Ablation V.
ISSN:	0277-786X
DOI:	10.1117/12.548157
Popis:	Pulsed-laser deposition is a unique technique that has been employed for thin film growth of a broad variety of materials. We report on the deposition and characterization of advanced piezoelectric thin films and ceramic/polymer composite layers. Pulsed-laser ablation and micro-patterning of piezoelectric GaPO 4 is presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cd0062502d595522b365b8226ee3d58a https://doi.org/10.1117/12.548157 Zobrazit plný text záznamu