Self-formation of SiGe oxide, Ge, and void multilayers via thermal oxidation of hydrogenated epitaxial SiGe films

Autor:	Junyang An, Ruiling Gong, Xinyu Li, Ileana Florea, Lise Watrin, Pere Roca i Cabarrocas, Wanghua Chen
Rok vydání:	2023
Předmět:	Condensed Matter Physics Instrumentation Surfaces Coatings and Films
Zdroj:	Vacuum. 213:112072
ISSN:	0042-207X
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ccb1333be02696b36bded2dad2a1c1d0 https://doi.org/10.1016/j.vacuum.2023.112072 Zobrazit plný text záznamu Full Text from ScienceDirect