A high intensity Nielson ion source for multicharged ions

Autor: K.G. Stephens, Ma Mingxiu, J.E. Mynard
Rok vydání: 1989
Předmět:
Zdroj: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 277:279-285
ISSN: 0168-9002
DOI: 10.1016/0168-9002(89)90755-9
Popis: A hot cathode Penning ion source, based on a Nielson source in use on the Surrey 500 keV implanter, has been developed. The improvements are in the structure of the discharge chamber and the design of the magnetic fields produced by the coil and filament currents. The results show that the brightness of the ion beams are greatly increased, with a good yield of multicharged ions.
Databáze: OpenAIRE