Metastability effects in hydrogenated microcrystalline silicon thin films investigated by the dual beam photoconductivity method
| Autor: | Rudolf Brüggemann, Hamza Cansever, Vladimir Smirnov, Mehmet Güneş, Gökhan Yilmaz, Friedhelm Finger |
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| Rok vydání: | 2012 |
| Předmět: |
Amorphous silicon
Materials science Annealing (metallurgy) Photoconductivity Analytical chemistry chemistry.chemical_element Condensed Matter Physics Oxygen Nitrogen Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry Metastability Materials Chemistry Ceramics and Composites Thin film Inert gas |
| Zdroj: | Journal of Non-Crystalline Solids. 358:2074-2077 |
| ISSN: | 0022-3093 |
| Popis: | Metastability effects in microcrystalline silicon (μc-Si:H) thin films have been investigated using dark conductivity, σD, photoconductivity, σph, and sub-bandgap absorption methods. Nitrogen and inert gasses can cause reversible aging effect in conductivities but not in the sub-bandgap absorption. However, DI water and O2 gas treatment result in both reversible and nonreversible effects in conductivities as well as in the sub-bandgap absorption. Only oxygen affected the dark conductivity reversibly in amorphous silicon, a-Si:H, films, other results were unaffected from the aging and annealing processes applied. |
| Databáze: | OpenAIRE |
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