Investigation of microfabrication of diamond-like film via focused ion beam milling

Autor:	Dongzhu Xie, Ngoi Kok Ann Bryan, Yongqi Fu
Rok vydání:	2003
Předmět:	Materials science business.industry Diamond engineering.material Diffraction efficiency Focused ion beam Optics X-ray photoelectron spectroscopy Coating engineering Optoelectronics Thin film business Instrumentation Refractive index Microfabrication
Zdroj:	Review of Scientific Instruments. 74:3689-3692
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1593812
Popis:	Optical properties (transmission and refractive index) and chemical structure (x-ray photoelectron spectroscopy) of a diamond-like coating (DLC) before and after focused ion beam milling (FIBM) process were investigated in this article. We find no influence of FIBM on optical properties and chemical structure of the DLC in the near-infrared region. The film can be used for optical applications. As an application example, a diffractive optical element (DOE) was directly fabricated on the film by FIBM. The measured diffraction efficiency of the DOE is 73%, which is acceptable for conventional use.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cc4eac272de59c6ee9573ffe9bb1118f https://doi.org/10.1063/1.1593812 Zobrazit plný text záznamu