Microstructure characterization of location-controlled Si-islands crystallized by excimer laser in the μ-Czochralski (grain filter) process
| Autor: | Satoshi Inoue, Yasushi Hiroshima, Ryoichi Ishihara, Ming He, Tatsuya Shimoda, C.I.M. Beenakker, D. Danciu, Frans D. Tichelaar, J.W. Metselaar |
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| Rok vydání: | 2007 |
| Předmět: |
Diffraction
education.field_of_study Materials science Condensed matter physics Population Condensed Matter Physics Microstructure Inorganic Chemistry Crystallography Electron diffraction Transmission electron microscopy Materials Chemistry Grain boundary Crystal twinning education Electron backscatter diffraction |
| Zdroj: | Journal of Crystal Growth. 299:316-321 |
| ISSN: | 0022-0248 |
| DOI: | 10.1016/j.jcrysgro.2006.12.010 |
| Popis: | Microstructure of location-controlled grains by μ-Czochralski process was characterized with electron backscattering diffraction (EBSD) and transmission electron microscopy (TEM). We confirmed that defects in the location-controlled grain are mainly Σ 3 twin boundary generating from near the rim of the grain filter, while random grain boundaries hardly exist. Dependence of the population was investigated on process parameters. We found that most of the Σ 3 twin boundaries have {1 1 1} facet plane, which, in same case, are massed with a nano-meter spacing. Σ 3 twin boundaries having facet planes {1 1 2} and {1 1 1}/{1 1 5} were also found to exist. |
| Databáze: | OpenAIRE |
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