Uniaxial Tensile Testing System for Quantitative Stress Analysis in Silicon Oxide Thin Films by Cathodoluminescence Spectroscopy
| Autor: | Nobutaka Goami, Shozo Inoue, Nobuyuki Naka, Nozomu Araki, Kentaro Nishikata, Takahiro Namazu, Naoaki Yamashita, Shigeru Kakinuma, K. Matsumoto |
|---|---|
| Rok vydání: | 2009 |
| Předmět: | |
| Zdroj: | Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials. |
| DOI: | 10.7567/ssdm.2009.p-2-9 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|