Independent Subsystems of Atomic Hydrogen in Silicon Responsible for Boron Passivation and for Dimer Production

Autor:	Vladimir V. Voronkov
Rok vydání:	2022
Předmět:	Materials Chemistry Surfaces and Interfaces Electrical and Electronic Engineering Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	physica status solidi (a). 219:2200081
ISSN:	1862-6319 1862-6300
DOI:	10.1002/pssa.202200081
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cc1030424daf4ebd46dd35331278d093 https://doi.org/10.1002/pssa.202200081 Zobrazit plný text záznamu Plný text