Development and characterization of thermoelectron enhanced microplasma devices for the generation of plasmas in micro-sized capillaries

Autor:	Kazuo Terashima, Sven Stauss, Masaki Sai, Hiroyuki Miyazoe
Rok vydání:	2007
Předmět:	Materials science Microplasma Nanotechnology Plasma Characterization (materials science)
Zdroj:	Transactions of the Materials Research Society of Japan. 32:531-534
ISSN:	2188-1650 1382-3469
DOI:	10.14723/tmrsj.32.531
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cbf1cf36b15e5638d77360c8cc301de0 https://doi.org/10.14723/tmrsj.32.531 Zobrazit plný text záznamu