Growth pressure dependence of neighboring mask interference in densely arrayed narrow-stripe selective MOVPE for integrated photonic devices

Autor:	K. Mori, Tadashi Nakazaki, Yoshitaka Yokoyama, Shinya Sudo, Masayuki Yamaguchi, Koji Kudo, Tatsuya Sasaki
Rok vydání:	2000
Předmět:	Growth pressure Chemistry business.industry Semiconductor materials Physics::Optics Pressure dependence Condensed Matter Physics Waveguide (optics) Inorganic Chemistry Optics Interference (communication) Materials Chemistry Integrated optics Metalorganic vapour phase epitaxy Photonics business
Zdroj:	Journal of Crystal Growth. 221:189-195
ISSN:	0022-0248
DOI:	10.1016/s0022-0248(00)00684-9
Popis:	We have investigated the dependence of neighboring mask interference on growth pressure in narrow-stripe selective MOVPE with arrayed stripe masks for the growth of densely-arrayed optical waveguides. Atmospheric-pressure MOVPE is effective in fabricating densely arrayed waveguide without inducing neighboring mask interference. On the other hand, low-pressure MOVPE has the advantage that the distribution of PL-wavelength over the microarray waveguide can easily be controlled by utilizing neighboring mask interference. An appropriate mask pattern and growth conditions for fabricating integrated photonic devices can thus be selected. A mask interference constant was introduced and used to simulate distributions of PL-wavelengths in arrayed waveguide. Simulated results matched experimental results well.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cbdb5bcee5d11fc76280818af080075b https://doi.org/10.1016/s0022-0248(00)00684-9 Zobrazit plný text záznamu Full Text from ScienceDirect