Flexible, Equipment-Wearable Piezoelectric Sensor With Piezoelectricity Calibration Enabled by In-Situ Temperature Self-Sensing

Autor: Bangbang Nie, Xiaoliang Chen, Guifang Liu, Xiaoming Chen, Wang Chunhui, Xiangming Li, Hongmiao Tian, Jinyou Shao
Rok vydání: 2022
Předmět:
Zdroj: IEEE Transactions on Industrial Electronics. 69:6381-6390
ISSN: 1557-9948
0278-0046
Popis: Flexible piezoelectric sensors have attracted much attention due to good dynamic response, high sensitivity, and self-powered sensing advantages. However, piezoelectric outputs are usually affected by temperature variation, thus limit their applications on industrial intelligent equipment. Here, a new flexible piezoelectric sensor with in-situ temperature sensing and piezoelectricity calibration function is developed. The sensor can calibrate the piezoelectric output based on temperature to achieve high-accuracy sensing capability. It consists of a flexible polyimide substrate, S-shaped platinum interdigital electrodes and aligned piezoelectric fibers. The temperature sensor has a high sensitivity of 19.2 /C with good linearity, and keeps good accuracy under bending deformation. And when the working temperature range is 25-60C, the sensor has a good piezoelectricity calibration effect, so that it maintains a stable sensitivity of 244mV/without being affected by temperature. Furthermore, this paper systematically studied the influence of temperature on piezoelectric output, and established a calibration method to improve the accuracy of piezoelectric output under temperature changes. Finally, the flexible integrated sensor was conformably attached on the bearing surface to in-situ sensing temperature and vibration. The structural design and piezoelectricity calibration method can promote the application of flexible piezoelectric sensors in the industrial field.
Databáze: OpenAIRE