Subnanometer-thick 2D GaN film with a large bandgap synthesized by plasma enhanced chemical vapor deposition

Autor:	Gehui Zhang, Luchen Chen, Le Wang, Zhanjie Lu, Haoyu Dong, Zhihai Cheng, Xu Zhang, Xiaohui Xu, Bin Wang, Shanshan Chen
Rok vydání:	2022
Předmět:	Renewable Energy Sustainability and the Environment General Materials Science General Chemistry
Zdroj:	Journal of Materials Chemistry A. 10:4053-4059
ISSN:	2050-7496 2050-7488
DOI:	10.1039/d1ta10450k
Popis:	An improved template method has been developed to synthesize subnanometer-thick 2D GaN films through the balance of nitridation and ion etching during N2 plasma enhanced CVD.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cb944ea167c247272143a4e70a4c72b2 https://doi.org/10.1039/d1ta10450k Zobrazit plný text záznamu