40-GHz coplanar waveguide bandpass filters on silicon substrate
| Autor: | J. Liu, W.J. Lin, K.T. Chan, Chao-Yuan Chen, Albert Chin, T.S. Duh, J.C. Hsieh |
|---|---|
| Rok vydání: | 2002 |
| Předmět: |
Waveguide filter
Materials science Silicon business.industry Transmission loss Coplanar waveguide Bandwidth (signal processing) Reflection loss Electrical engineering chemistry.chemical_element Condensed Matter Physics chemistry Band-pass filter Scattering parameters Optoelectronics Electrical and Electronic Engineering business |
| Zdroj: | IEEE Microwave and Wireless Components Letters. 12:429-431 |
| ISSN: | 1558-1764 1531-1309 |
| Popis: | We report a very simple process to fabricate high performance filter on Si at 40 GHz using proton implantation. The filter has only -3.4-dB loss at peak transmission of 40 GHz with a broad 9-GHz bandwidth. In sharp contrast, the filter on 1.5-/spl mu/m SiO/sub 2/ isolated Si has much worse transmission and reflection loss. This is the first demonstration of high performance filter at the millimeter-wave regime on Si with process compatible with current VLSI technology. |
| Databáze: | OpenAIRE |
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