Reactive ion beam sputtering of superconducting thin films: From a new beam source concept to advanced materials deposition
| Autor: | Marszalek, Konstanty Waldemar, D.Korzec, D.Teirich, M.Wielunski, J.Engemann |
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| Rok vydání: | 1991 |
| DOI: | 10.13140/rg.2.1.4815.2403 |
| Databáze: | OpenAIRE |
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