Towards control of TiO2 thickness film in R-HiPIMS process with a coupled optical and electrical monitoring of plasma

Autor:	D. Boivin, A. Najah, R. Jean-Marie-Désirée, C. Noël, G. Henrion, S. Cuynet, L. De Poucques
Rok vydání:	2022
Předmět:	Materials Chemistry Surfaces and Interfaces General Chemistry Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	Surface and Coatings Technology. 433:128073
ISSN:	0257-8972
DOI:	10.1016/j.surfcoat.2021.128073
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cb25079b1b1c9a45808836e5185ea0c7 https://doi.org/10.1016/j.surfcoat.2021.128073 Zobrazit plný text záznamu Full Text from ScienceDirect