Sensitivity and reliability enhancement of a MEMS based wind speed sensor
| Autor: | Kamaljit Rangra, Dharmendar Boolchandani, Vimal Kumar Agrawal, Tarun Varma, Raju Patel |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Imagination Microelectromechanical systems Materials science media_common.quotation_subject Acoustics 020208 electrical & electronic engineering 02 engineering and technology Condensed Matter Physics 01 natural sciences Atomic and Molecular Physics and Optics Wind speed Finite element method Surfaces Coatings and Films Electronic Optical and Magnetic Materials Reliability (semiconductor) 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Paddle Sensitivity (control systems) Electrical and Electronic Engineering Safety Risk Reliability and Quality media_common Stress concentration |
| Zdroj: | Microelectronics Reliability. 104:113513 |
| ISSN: | 0026-2714 |
| DOI: | 10.1016/j.microrel.2019.113513 |
| Popis: | This paper describes shape modification of microcantilever to enhance the sensitivity and reliability of a MEMS based wind speed sensor. Finite element analysis simulations with COMSOL and the experimental results have been compared to evaluate the performance of the fabricated sensor. The sensitivity is increased with modified structure to 108.46 μV/V-ms–1. Use of full cut stress concentration regions results in substantial increase of nearly four times the sensitivity of a simple rectangular paddle microcantilever. Introducing fillets at the paddle-cantilever junction resulted in improved reliability. |
| Databáze: | OpenAIRE |
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