Facile Process for Fabrication of Silicon Micro–Nanostructures of Different Shapes as Molds for Fabricating Flexible Micro–Nanostructures and Wearable Sensors
| Autor: | Xiaoke Ding, Md Fazlay Rubby, Suya Que, Sajid Uchayash, Long Que |
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| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | ACS Applied Materials & Interfaces. 15:12202-12208 |
| ISSN: | 1944-8252 1944-8244 |
| DOI: | 10.1021/acsami.2c22285 |
| Databáze: | OpenAIRE |
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