Optimization Study of a Probe Chuck for Semiconductor Wafers Using Genetic Algorithm and Deep Reinforcement Learnings
| Autor: | Geuna Choi, Sheriff Abiodun Aodu, Seungyeop Lee, Da Hye Kim, Jae-Wook Lee, Jung Hyun Gug, You Byungchul, Ilseouk Park |
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| Rok vydání: | 2023 |
| DOI: | 10.2139/ssrn.4441803 |
| Databáze: | OpenAIRE |
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