Prevention of oil vapor backstreaming in vacuum systems by gas purge method

Autor:	Y. Tsutsumi, Kobayashi Junichi, M. Ikegawa, Shinjiro Ueda
Rok vydání:	1990
Předmět:	Chemistry Nuclear engineering Flow (psychology) Analytical chemistry Surfaces and Interfaces Condensed Matter Physics Quadrupole mass analyzer Purge Surfaces Coatings and Films Volumetric flow rate
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 8:2764-2767
ISSN:	1520-8559 0734-2101
DOI:	10.1116/1.576664
Popis:	Mechanical pumps have been used as roughing pumps in many vacuum systems because of the ease of their operation. However, it is a well known fact that heavy oil vapor backstreaming occurs when mechanical pumps are operated at pressures close to their ultimate pressure. This backstreaming oil vapor contaminates the vacuum system. Recently, oil contamination has become a serious problem in the semiconductor manufacturing process. In this paper, the results from experiments to prevent oil vapor backstreaming in a pipe that is 9 cm in diam. and 220 cm in length in the transition flow region, using gas purge is examined. Backstreaming oil is measured quantitatively with and without gas purge using a quadrupole mass analyzer and a differential pumping system. The results show that even in the transition flow region, oil vapor backstreaming is prevented by a small flow rate of purge gas.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cabf026591d2a5af958e5977aefcccae https://doi.org/10.1116/1.576664 Zobrazit plný text záznamu