A compact optical heterodyne interferometer by optical integration and its application

Autor:	Akira Taniguchi, Isao Kobayashi, Koichiro Miyagi, Masaya Nanami
Rok vydání:	1997
Předmět:	Quantum optics Physics Hysteresis Accuracy and precision Interferometry Optics Observational error business.industry System of measurement Measure (physics) business Piezoelectricity Atomic and Molecular Physics and Optics
Zdroj:	Optical Review. 4:A133-A137
ISSN:	1349-9432 1340-6000
DOI:	10.1007/bf02936011
Popis:	A compact high-resolution optical heterodyne interferometer combining a two-frequency light module and a minute optical system is described. The light module, which generates two independent frequencies of light, is fabricated by proton exchange method on LiNbO3 substrate. We report an experiment evaluating measurement accuracy using a micro-displacement measurement system which incorporates this interferometer. Results of the experiment with a standard thickness sample show high thermal stability with maximum measurement error of 1.8 nm at a temperature from 19°C to 33°C. The system was used to measure the hysteresis of a piezoelectric element for displacements of several nm, thereby making it possible to analyze the system quantitatively in practice.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ca9860bb39cd1ca556a8e6ab7a2f064e https://doi.org/10.1007/bf02936011 Zobrazit plný text záznamu Full text from SpringerLink