Evaporation of films of chemical elements with a neodymium glass laser

Autor:	B A Kalin, G N Shishkin, I N Nikolaev, V M Boyakov, V M Epikhin, M K Makhatov
Rok vydání:	1978
Předmět:	Materials science business.industry General Engineering chemistry.chemical_element Radiation Laser Evaporation (deposition) Neodymium law.invention Glass laser Optics Carbon film chemistry law Optoelectronics Crystallite Thin film business
Zdroj:	Soviet Journal of Quantum Electronics. 8:902-904
ISSN:	0049-1748
DOI:	10.1070/qe1978v008n07abeh010475
Popis:	Thin films were evaporated using a quasi-cw neodymium glass laser. Thin (~10 nm) uniform-thickness films of many elements were deposited using laser radiation intensities q >1 MW/cm2. These films were mainly polycrystalline.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ca731c18f3c0dbd31f8f394b316b831d https://doi.org/10.1070/qe1978v008n07abeh010475 Zobrazit plný text záznamu