Selfaligned integrated silica on silicon waveguide-photodiode interface

Autor:	C.G. Crookes, C.R. Pescod, I.R. Croston
Rok vydání:	1994
Předmět:	Waveguide photodiode Materials science Silicon business.industry Doping Bandwidth (signal processing) chemistry.chemical_element Photodiode law.invention Planar Optics chemistry law Optoelectronics Integrated optics Electrical and Electronic Engineering business
Zdroj:	Electronics Letters. 30:1002-1003
ISSN:	1350-911X 0013-5194
DOI:	10.1049/el:19940662
Popis:	The authors report the demonstration of planar, doped silica waveguides integrated with rear-illuminated InGaAs/InP photodiodes for use in compact, singlemode, optoelectronic hybrid modules. The photodiodes are assembled with the waveguides using a selfaligned technique giving a mean excess loss of 0.9 dB at 1.3 µm and a 3 dB bandwidth of 1.5 GHz.
Databáze:	OpenAIRE
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