Autor: |
Hem M. Vaidya, Philip W. Diodato, W.S. Lindenberger, W.Y.C. Lai, S. Chaudhry, C.-T. Liu, J.H. O'Neill, A.C. Dumbri, Y.-H. Wong, Glenn B. Alers |
Rok vydání: |
2002 |
Předmět: |
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Zdroj: |
Proceedings of the IEEE 2000 Custom Integrated Circuits Conference (Cat. No.00CH37044). |
DOI: |
10.1109/cicc.2000.852669 |
Popis: |
Embedded DRAM memory cells employing advanced capacitor dielectrics (Ta/sub 2/O/sub 5/) have been designed, fabricated, and measured. Memory cell data retention time is used to compare capacitor characteristics between four Ta/sub 2/O/sub 5/ equipment vendors. Static behavior in one type of DRAM cell is attributed to the bimodal current-voltage characteristic of the Ta/sub 2/O/sub 5/, and circuit topography. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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