Thick silver coating deposited by DC magnetron sputtering

Autor:	Dang Xuan Cu, Pham Hong Tuan
Rok vydání:	2004
Předmět:	Materials science business.industry Sputter deposition engineering.material Electrochemistry Micrometre Optics Coating Sputtering Silver coating Cavity magnetron engineering Optoelectronics business Microwave
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.512891
Popis:	Due to high conductivity, silver coating is often used as high reflectivity mirror in optical and in microwave spectrum area. The thickness of silver film in optical application is usually less than the one used in microwave range. Thin silver coating has been successfully deposited by thermal evaporation. Meanwhile thick silver film of tens micrometer is often made by electrochemical process. DC magnetron is well known as good method for depositing metallic coating. Here we present an attempt to apply DC magnetron sputtering for depositing thick silver mirror. Results show that coating made by this method meet well the requirements in microwave range.
Databáze:	OpenAIRE
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