Design and fabrication of soft X-ray double frequency grating
| Autor: | 徐向东 Xu Xiang-dong, 刘颖 Liu Ying, 付绍军 Fu Shao-jun, 邱克强 Qiu Ke-qiang, 刘正坤 Liu Zheng-kun |
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| Rok vydání: | 2013 |
| Předmět: |
Diffraction
Materials science Holographic grating business.industry Physics::Optics Grating Diffraction efficiency Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention Ultrasonic grating Interferometry Optics law Blazed grating Physics::Atomic Physics Shearing interferometer business |
| Zdroj: | Optics and Precision Engineering. 21:1780-1785 |
| ISSN: | 1004-924X |
| DOI: | 10.3788/ope.20132107.1780 |
| Popis: | Applications of a soft X-ray double frequency grating shearing interferometer to laser plasma diagnostics were explored by using a soft X-ray double frequency grating as the shearing interferometric element.To improve the success rate of experiment,this paper analyzed the line parallelism and diffraction efficiency of the double frequency grating.On the basis of the relationship between the line parallelism of the double frequency grating and the interferogram of shearing interferometer,it calculated the technical requirements of line parallelism of the grating.The fabrication method was described,the line parallelism of the grating was realized with the diffraction spot position monitoring,and the moire fringe method was applied in line parallelism judgment for the grating.A double frequency grating with line parallelism less than 0.01° was fabricated.The two groups of diffraction efficiencies of-1 order for the grating were examined in spectral radiation standard and metrology beamline of Hefei National Synchrotron Radiation Laboratory,and the results show both of them are over 10% at 13.9 nm.A shearing interferometer was set up for dense plasma diagnostics,whose results demonstrate that the parallelism and diffraction efficiency of the double-frequency grating can meet the experimental requirements. |
| Databáze: | OpenAIRE |
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