Compatible CMOS microsystems for automotive and medical applications

Autor:	W. Mokwa, Ralf Kersjes
Rok vydání:	1996
Předmět:	Microelectromechanical systems Process (engineering) business.industry Computer science Automotive industry Hardware_PERFORMANCEANDRELIABILITY BiCMOS CMOS Microsystem Hardware_INTEGRATEDCIRCUITS Electronic engineering Electronics Photomask business
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.250703
Popis:	Integration of sensors and electronics on the same substrates becomes more and more important. CMOS circuit design seems to be the most important technique for the monolithic approach. Compared to bipolar circuits power consumption is much lower, compared to BICMOS the process is much less complex therefore having a much lower number of masks. This is very important because inmost cases monolithic integration means additional process steps and by this a higher process complexity. This paper wants to give a few examples for the monolithic approach in the field of physical sensors based on CMOS-technologies for automotive and for medical applications.
Databáze:	OpenAIRE
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