Three-Dimensional Microelectromechanical Systems (MEMS) Structures Assembled from Polysilicon Surface Micromachined Elements Containing Continuous Hinges and Microrivets

Autor:	Edward S. Kolesar, Matthew D. Ruff
Rok vydání:	2021
Zdroj:	2003 GSW Proceedings.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c9c79b28198d875300219a2d4649f0e6 https://doi.org/10.18260/1-2-620-38510 Zobrazit plný text záznamu