Silicon micromachined integrated suspension systems for magnetic disk drives
| Autor: | Viktoria Temesvary, Yu-Chong Tai, Denny K. Miu, Shuyun Wu |
|---|---|
| Rok vydání: | 1996 |
| Předmět: |
Engineering
Fabrication Silicon business.industry Metals and Alloys Electrical engineering Mechanical engineering Stiffness chemistry.chemical_element Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Surface micromachining chemistry Electrode medicine Head (vessel) Electrical and Electronic Engineering medicine.symptom business Suspension (vehicle) Instrumentation Dynamic testing |
| Zdroj: | Sensors and Actuators A: Physical. 55:195-200 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/s0924-4247(97)80078-7 |
| Popis: | This paper presents results related to the design, fabrication and static/dynamic testing of a silicon micromachined integrated suspension system. This novel magnetic read/write head suspension with its built-in electrodes has been developed especially for automated assembly with miniaturized slider bearings. The one-piece construction silicon microgimbal and the polyimide-reinforced silicon load-beam are designed to have minimum profile, maximum pitch and roll compliances, maximum in-plane stiffness and maximum shock resistance, all of which are important operational requirements for the emerging small-form-factor magnetic recording rigid disk drive market. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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