Structural characterization of BaTiO3 films by sol-gel method using mono-substituting chelating agent
| Autor: | Woei-Kwo Kuo, Jyh-Ping Wang, Yong-Chien Ling |
|---|---|
| Rok vydání: | 1996 |
| Předmět: |
Static secondary-ion mass spectrometry
Materials science Diffusion General Physics and Astronomy Mineralogy Crystal growth Surfaces and Interfaces General Chemistry Condensed Matter Physics Surfaces Coatings and Films Characterization (materials science) Crystallography Phase (matter) Chelation Thin film Sol-gel |
| Zdroj: | Applied Surface Science. 92:155-158 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/0169-4332(95)00221-9 |
| Popis: | BaTiO 3 films have been deposited onto Pt Si substrates by repeated spin-coating and heat-treatment of precursors prepared by a sol-gel process using Ti(O- i Pr) 4 , Ba(CH 3 COO) 2 , and chelating agent CH 3 COCH 2 COCH 3 . These films exhibit cubic phase structure and possess desired (110) orientation. Representative fragments Ti + , TiO + , Ba + and BaOH + from BaTiO 3 lattices are observed in the positive static SIMS spectrum. A well-defined interface between a BaTiO 3 film and a Pt Si substrate suggests that the proposed method is capable of depositing BaTiO 3 films onto Pt Si substrates without Si diffusion from underlying Pt Si substrates. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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