Energy analysis in positive SIMS with Cs+ beams

Autor:	A. M. C. Moutinho, Omnd Teodoro, Mjp Maneira
Rok vydání:	1994
Předmět:	Energy distribution Chemistry Analytical chemistry Condensed Matter Physics Energy analysis Surfaces Coatings and Films Ion Cesium ions Sputtering Yield (chemistry) mental disorders Atomic physics Instrumentation Beam (structure)
Zdroj:	Vacuum. 45:15-18
ISSN:	0042-207X
DOI:	10.1016/0042-207x(94)90333-6
Popis:	A study using a primary Cs+ beam to carry out positive SIMS on conductive samples is presented. The energy distribution of positive secondary ions was measured and the sputter yield, S+ was calculated for several elements. The significantly different energetic behavior found between the secondary cesium ions and those ejected from the target will be discussed. Finally, the best conditions to perform positive SIMS with such a primary beam will be described.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c98cd6040ac7ef0465a65e0a36b94ece https://doi.org/10.1016/0042-207x(94)90333-6 Zobrazit plný text záznamu