Small and sensitive force sensors based on contact resistance
| Autor: | Morio Tomizawa, Masayuki Nakao, Tatsuya Higashisaka, Watanabe Haruhiko, Keisuke Nagato, Eitaro Tanaka |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Reproducibility Materials science Contact resistance 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics Curvature 01 natural sciences Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Conductor Electrical resistance and conductance Natural rubber visual_art 0103 physical sciences visual_art.visual_art_medium Miniaturization Electrical and Electronic Engineering Composite material 0210 nano-technology Strain gauge |
| Zdroj: | Microelectronic Engineering. 216:111058 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2019.111058 |
| Popis: | Small and sensitive force sensors are important components for various applications, such as wearable devices and the Internet of things (IoT) applications. A strain gauge is the most general type of force sensor; however, its miniaturization is limited because a structure is needed to form the strain. In this study, we investigated a new force measurement method based on contact electrical resistance that has the potential to be smaller than strain gauges. In this method, when force is applied to the back of a part with a curvature, the part deforms, and the contact electrical resistance between the curvature and a counter conductor surface increases. We evaluated the proposed method by applying static and dynamic forces between indium‑tin-oxide-coated glass and gold-coated rubber and measuring contact resistance. The experimental results demonstrated the reproducibility between nine cycles of loading and unloading, and the contact resistance fluctuated in the order of mN following the applied load at approximately 6 Hz. Therefore, we showed the efficacy of our proposed measurement method to measure applied static and dynamic forces. |
| Databáze: | OpenAIRE |
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