Spray-on glass solution for fabrication silicon solar cell emitter layer
| Autor: | Edyta Wrobel, Krzysztof Waczynski, Grazyna Kulesza-Matlak, M. Lipiński, Wojciech Filipowski, Kazimierz Drabczyk |
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| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Fabrication Materials science Dopant Diffusion Doping Analytical chemistry 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials 0103 physical sciences Deposition (phase transition) Wafer Electrical and Electronic Engineering 0210 nano-technology Sheet resistance Common emitter |
| Zdroj: | Microelectronics International. 34:149-153 |
| ISSN: | 1356-5362 |
| DOI: | 10.1108/mi-12-2016-0089 |
| Popis: | Purpose The main aim of this study was a preparation development of dopant solution (DS) which can be deposited by a spray-on method and subsequently allows obtaining the n+ emitter layer with surface resistance in the range of 65-80 Ω−1. The intention of chosen spray-on method was to gain a cheaper way of dopant source deposition, compared to the commonly used methods, which is of particular importance for the new low-cost production processes. Design/methodology/approach This paper presents the sequence in producing a spray-on glass solution (DS) with very high concentration of phosphorus, which allows to perform diffusion doping at relatively low temperatures. DS contained deionized water, ethyl alcohol, tetraethoxysilane and othophosphoric acid. Findings The sequence in producing a DS was performed with respect to enabling the application to silicon wafers by spray-on method. Furthermore, the equations defined density and viscosity of DS in term of storage time were referred to determine the possibility of applying this solution by spray-on method. Besides, the dependence of the emitter surface resistance on the doping (diffusion) time was determined. Accordingly, optimal process conditions were specified. Originality/value The paper presents a new, so far unpublished composition of DS with very high concentration of phosphorus, which can be applied using a spray-on method. Moreover, original are also investigations respecting some properties of obtained DS relative to storage time. |
| Databáze: | OpenAIRE |
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