Laser spectroscopy of the products of photoevaporation with a short-wavelength (λ = 193 nm) excimer laser
| Autor: | A M Prokhorov, K S Gochelashvili, V T Mikhkel'soo, O N Evdokimova, M E Zemskov |
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| Rok vydání: | 1999 |
| Předmět: |
Materials science
Dye laser Spectrometer Excimer laser business.industry medicine.medical_treatment Statistical and Nonlinear Physics Laser Excimer Photoevaporation Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention X-ray laser Optics law medicine Optoelectronics Electrical and Electronic Engineering Spectroscopy business |
| Zdroj: | Quantum Electronics. 29:168-170 |
| ISSN: | 1468-4799 1063-7818 |
| DOI: | 10.1070/qe1999v029n02abeh001440 |
| Popis: | An excimer laser spectrometer was designed and constructed. It consists of a high-vacuum interaction chamber, a short-wavelength (λ = 193 nm) excimer ArF laser used for evaporation, a probe dye laser pumped by an XeCl excimer laser, and a system for recording a laser-induced fluorescence signal. This spectrometer was used to investigate nonthermal mechanisms of photoevaporation of a number of wide-gap dielectrics. |
| Databáze: | OpenAIRE |
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