Charging of an irregularly shaped particle in the sheath of an rf plasma
Autor: | Hendrik Jung, Alexander Piel, Oguz Han Asnaz, Franko Greiner |
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Rok vydání: | 2018 |
Předmět: | |
Zdroj: | Physics of Plasmas. 25:073702 |
ISSN: | 1089-7674 1070-664X |
DOI: | 10.1063/1.5038183 |
Popis: | The charging process of micrometer-sized irregularly shaped particles in the sheath of a radio frequency discharge is measured using a combination of long-distance microscopy and the phase-resolved resonance method. The applicability of the method is shown for a cylindrical zinc oxide particle by measuring its mass density. A particle with more complex geometry is compared to a spherical polymethyl methacrylate particle to investigate the charging of irregularly shaped particles in detail. The results are similar to the charging of the smallest enclosing sphere suggesting that the charging process is independent of the shape of the particle. Furthermore, molecular dynamics simulations were performed, which support the experimental results. |
Databáze: | OpenAIRE |
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