Development of a Compliant Rolling-Contact Element Based Foldable Xy Stage for Micro-Positioning System
| Autor: | Yanlin Xie, Yangmin Li, Chifai Cheung, Xiao Xiao, Xigang Chen, Ruobing Wang |
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| Rok vydání: | 2022 |
| Zdroj: | SSRN Electronic Journal. |
| ISSN: | 1556-5068 |
| Databáze: | OpenAIRE |
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