Development of a Compliant Rolling-Contact Element Based Foldable Xy Stage for Micro-Positioning System
Autor: | Yanlin Xie, Yangmin Li, Chifai Cheung, Xiao Xiao, Xigang Chen, Ruobing Wang |
---|---|
Rok vydání: | 2022 |
Zdroj: | SSRN Electronic Journal. |
ISSN: | 1556-5068 |
Databáze: | OpenAIRE |
Externí odkaz: |