Effect of substrate temperature on structural, morphological, optical and electrical properties of IGZO thin films
| Autor: | Vinoth Kumar Jayaraman, Arturo Maldonado Álvarez, María de la Luz Olvera Amador |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Materials science Nanostructure business.industry chemistry.chemical_element 02 engineering and technology Substrate (electronics) 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials chemistry Electrical resistivity and conductivity 0103 physical sciences Optoelectronics Electrical measurements Thin film Composite material Gallium 0210 nano-technology business Indium Wurtzite crystal structure |
| Zdroj: | Physica E: Low-dimensional Systems and Nanostructures. 86:164-167 |
| ISSN: | 1386-9477 |
| Popis: | Indium and gallium co-doped zinc oxide (IGZO) thin films were deposited on glass substrates by ultrasonic spray pyrolysis . Physical properties such as structural, morphological, optical and electrical properties were examined on IGZO thin films with respect to the changes in the substrate temperature (425, 450 and 475 °C). Structural results showed that IGZO films were crystalline and presented hexagonal wurtzite structure. Morphological studies proved that the substrate temperature changed the sizes of hexagonal nanostructures of IGZO. Optical transmittance in the UV–vis region and electrical measurements confirmed that IGZO films were transparent (>70%) with a minimum electrical resistivity ~10.5×10 −3 Ω cm. |
| Databáze: | OpenAIRE |
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