Autor:	S. Fukuta, T. Ishii, N. Kondo, O. Toyoda, Keiichi Betsui
Rok vydání:	2005
Předmět:	Materials science Silicon business.industry Field emitter array Silicon on insulator chemistry.chemical_element Matrix (mathematics) Ion implantation chemistry Etching (microfabrication) Electronic engineering Microelectronics Optoelectronics business
Zdroj:	[Proceedings] IVMC '93 Sixth International Vacuum Microelectronics Conference.
DOI:	10.1109/ivmc.1993.700318
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c8f8f57eea2d588fdb3344b2dd34644f https://doi.org/10.1109/ivmc.1993.700318 Zobrazit plný text záznamu