ALD Mo for Advanced MOL Local Interconnects

Autor:	Maryamsadat Hosseini, Davide Tierno, Jan Willem Maes, Chiyu Zhu, Sukanya Datta, Young Byun, Moataz Mousa, Nicolas Jourdan, Eugenio Dentoni Litta, Naoto Horiguchi
Rok vydání:	2022
Zdroj:	2022 IEEE International Interconnect Technology Conference (IITC).
DOI:	10.1109/iitc52079.2022.9881322
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c8de1839fba29e5ed41c7dd1c3a7d7f9 https://doi.org/10.1109/iitc52079.2022.9881322 Zobrazit plný text záznamu