Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing

Autor:	V. V. Zatekin, A. A. Batrakov, V. S. Kulikauskas, Vladimir Privezentsev, D. V. Petrov, A. Yu. Trifonov
Rok vydání:	2015
Předmět:	Ion implantation Materials science Silicon chemistry Transmission electron microscopy Microscopy Analytical chemistry Nanoparticle chemistry.chemical_element Surface layer Thin film Layer (electronics) Surfaces Coatings and Films
Zdroj:	Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 9:486-495
ISSN:	1819-7094 1027-4510
DOI:	10.1134/s1027451015020160
Popis:	The cross section of a Si surface layer implanted with 64Zn+ and 16O+ ions is visualized via high-resolution transmission electron microscopy, and its evolution as a result of thermal annealing is investigated. The profiles of impurities implanted into this layer, which are measured by means of secondary-ion mass spectrometry, as well as their changes arising from heat treatment, are analyzed. The surface morphology is examined with the help of atomic-force microscopy.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c8d836b6b04eb68948443576dd03976e https://doi.org/10.1134/s1027451015020160 Zobrazit plný text záznamu Full text from SpringerLink