High-precision detection method for an object edge based on a position-sensitive detector

Autor:	Yusheng Zhai, Yiheng Zhao, Saisai Yan, Zhifeng Zhang, Lijie Geng, Ruiliang Zhang, Kun Yang, Cuifang Kuang
Rok vydání:	2023
Předmět:	Electrical and Electronic Engineering Engineering (miscellaneous) Atomic and Molecular Physics and Optics
Zdroj:	Applied Optics. 62:1815
ISSN:	2155-3165 1559-128X
Popis:	The paper proposed and verified a method of object edge detection based on the innovative defect spot working mode of the position-sensitive detector (PSD). With the output characteristics of the PSD in the defect spot mode and the size transformation properties of a focused beam, edge-detection sensitivity could be improved. Calibration experiments with the piezoelectric transducer (PZT) and object edge-detection experiments indicate that the object edge-detection sensitivity and accuracy of our method could reach 1 and 20 nm, respectively. Therefore, this method can be widely used in high-precision alignment, geometric parameters measurement, and other fields.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c8bd3201835192a13a1dd76d929d4e4e https://doi.org/10.1364/ao.482605 Zobrazit plný text záznamu