High Purity Water for Semiconductor Manufacturing

Autor:	E. Krapf, R. Preisser
Rok vydání:	1988
Předmět:	Reliability (semiconductor) Materials science Impurity Semiconductor device fabrication Yield (chemistry) Metallurgy Ultrapure water Ionic bonding Semiconductor device Ionic contamination
Zdroj:	Process Technologies for Water Treatment ISBN: 9781468485585
DOI:	10.1007/978-1-4684-8556-1_17
Popis:	Ultrapure water is an essential chemical and material for the production of semiconductor devices. Impurities in the process water such as bacteria, organics, ionic contaminations and particles are a potential cause of reduced device yield and reliability failures.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c88728b655e67692a4bd996ee8145ce4 https://doi.org/10.1007/978-1-4684-8556-1_17 Zobrazit plný text záznamu