DELTA - A Novel Ultra-Low Voltage SEM for Electron Spectroscopic Imaging

Autor:	Martin Pfannmöller, Michael Schnell, Jakob Wensorra, Jochen Kammerer, Wen-Shan Zhang, Lisa Veith, Irene Wacker, Dirk Preikszas, Bernd Schindler, Christian Hendrich, Rasmus R. Schröder, Jorg Eisele
Rok vydání:	2018
Předmět:	010302 applied physics Delta Materials science business.industry 02 engineering and technology Electron 021001 nanoscience & nanotechnology 01 natural sciences 0103 physical sciences Optoelectronics 0210 nano-technology business Instrumentation Low voltage
Zdroj:	Microscopy and Microanalysis. 24:626-627
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s1431927618003628
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c862686bc597bb05562739885c5c9b2f https://doi.org/10.1017/s1431927618003628 Zobrazit plný text záznamu