J1640204 Tip position control in dual-axis friction force microscope with a micro actuator

Autor:	Hedong Zhang, Satoshi Hamaoka, Shintaro Itoh, Mikito Takahahsi, Kenji Fukuzawa
Rok vydání:	2014
Předmět:	Optics Materials science Microscope Micro actuator business.industry law Friction force business Dual axis Tip position law.invention
Zdroj:	The Proceedings of Mechanical Engineering Congress, Japan. 2014:J1640204
ISSN:	2424-2667
DOI:	10.1299/jsmemecj.2014._j1640204-
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c858624274ebb925b581b9223a23b6ad https://doi.org/10.1299/jsmemecj.2014._j1640204- Zobrazit plný text záznamu