Effect of Impurities in Vacuum Vessels on the Plasma Parameters in Inductive Discharges

Autor:	Young-Gi Kim, H. J. Yeom, Deuk-Chul Kwon, Kwan-Yong Kim, Gwang-Seok Chae, Jung-Sik Yoon, Jung Hyung Kim, Hyochang Lee
Rok vydání:	2023
Předmět:	History Polymers and Plastics Business and International Management Industrial and Manufacturing Engineering
Zdroj:	SSRN Electronic Journal.
ISSN:	1556-5068
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c850323ae93b6a3112b29f8e8907ae30 https://doi.org/10.2139/ssrn.4405744 Zobrazit plný text záznamu