Temperature measurement method for dielectric layer characterization in a high voltage vacuum prober
| Autor: | Benoit Schlegel, Marie-Laure Locatelli, Sorin Dinculescu, Vincent Bley |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Materials science
business.industry Context (language use) 02 engineering and technology Dielectric 021001 nanoscience & nanotechnology Temperature measurement Characterization (materials science) 020401 chemical engineering Dielectric layer Optoelectronics 0204 chemical engineering 0210 nano-technology business Voltage |
| Zdroj: | 2017 International Symposium on Electrical Insulating Materials (ISEIM). |
| DOI: | 10.23919/iseim.2017.8166601 |
| Popis: | During the dielectric characterization of an insulating material the temperature of the sample is of great importance for understanding the underlying behaviors. In the specific context of a vacuum prober some difficulties may arise when direct measurements methods for the temperature are used. Therefore, an indirect method for temperature measurements is proposed and tested hereafter. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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