Study of laser-deposited metallic thin films by a combination of high-resolution ex situ and time-resolved in situ experiments
| Autor: | Astrid Pundt, Michael Seibt, Michael Störmer, Kai Sturm, Hans-Ulrich Krebs, J. Winkler, S. Senz, S. Kahl, Sebastian Fähler, M. Weisheit, Ph. Kesten |
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| Rok vydání: | 1999 |
| Předmět: |
Materials science
Analytical chemistry 02 engineering and technology General Chemistry 021001 nanoscience & nanotechnology Laser 01 natural sciences law.invention Electron diffraction law 0103 physical sciences Deposition (phase transition) General Materials Science Nanometre Thin film Electron microscope 010306 general physics 0210 nano-technology High-resolution transmission electron microscopy Field ion microscope |
| Zdroj: | Applied Physics A: Materials Science & Processing. 69:S455-S457 |
| ISSN: | 1432-0630 0947-8396 |
| DOI: | 10.1007/s003390051437 |
| Popis: | Laser-deposited metallic alloys and multilayers were studied in detail by a combination of high-resolution ex situ and time-resolved in situ experiments. The purpose of these experiments is to better understand the special properties of laser-deposited metallic films in comparison with conventionally prepared thin films. During deposition, thickness, resistance, and electron diffraction (THEED) experiments show that the film surface is resputtered, local mixing at the interfaces of multilayers on a nanometre scale occurs, and metastable phases up to large film thicknesses are formed. After deposition, a compressive stress of 1–2 GPa was measured using four-circle diffractometry, and growth defects were observed on an atomic scale by electron microscopy (HRTEM) and field ion microscopy (FIM). The obtained structural details of the metallic films can be explained by an implantation model for the laser deposition process. |
| Databáze: | OpenAIRE |
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