A reliability of different metal contacts with amorphous carbon
| Autor: | Shashi Paul, F. J. Clough |
|---|---|
| Rok vydání: | 2002 |
| Předmět: |
Materials science
Metallurgy chemistry.chemical_element Dielectric Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Amorphous solid Metal Reliability (semiconductor) Amorphous carbon chemistry visual_art visual_art.visual_art_medium Electrical and Electronic Engineering Safety Risk Reliability and Quality Layer (electronics) Carbon |
| Zdroj: | Microelectronics Reliability. 42:141-143 |
| ISSN: | 0026-2714 |
| DOI: | 10.1016/s0026-2714(01)00133-0 |
| Popis: | The reliability of metal contacts to amorphous diamond-like carbon (DLC) is important. It has been proposed by various workers that DLC can be used as a low dielectric material. In the light of this, we have investigated the reliability of devices that comprise a DLC layer, in contact with different metals. This investigation shows that Al is not a good metal to use, to make contacts to a-C:H films, while Cu and Cr are quite stable as metal contacts to a-C:H. This study shows the importance of the selection of the metal that is to be used to form contacts to a-C:H. This investigation was carried out for the first time on a-C:H films. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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