Oblique incidence interferometry for gear-tooth surface profiling

Autor:	Tomomi Ino, Toyohiko Yatagai
Rok vydání:	1992
Předmět:	Materials science business.industry Optical engineering Resolution (electron density) Laser law.invention Interferometry Optics Wedge prism law Reference beam Reference surface Astronomical interferometer business
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.132156
Popis:	An oblique incidence interferometer for measuring a non-optical surface of a gear tooth with a phase shifting method is developed. The incidence angle of a He-Ne laser is set to be 84.75 degree(s) with a wedge prism, to obtain fringe spacing corresponding to the height of 3.64 micrometers . The reference beam is piezo-electrically modulated to make phase shifting fringe analysis. A high resolution CCD camera with resolution of 1280 X 1024 is used so that about 200 fringes can be analyzed. The maximum deviation of about 420 micrometers from a plane reference surface is measured with an accuracy of 40 nm.© (1992) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Databáze:	OpenAIRE
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