Synthesis of buried metal oxide films by high fluence oxygen ion implantation into metals
Autor: | B. Rauschenbach, C. Hammerl |
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Rok vydání: | 2001 |
Předmět: |
Nuclear and High Energy Physics
Materials science Analytical chemistry Oxide chemistry.chemical_element Rutherford backscattering spectrometry Fluence Oxygen Metal chemistry.chemical_compound chemistry Transmission electron microscopy Molybdenum visual_art visual_art.visual_art_medium Instrumentation Titanium |
Zdroj: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 178:220-223 |
ISSN: | 0168-583X |
DOI: | 10.1016/s0168-583x(00)00464-x |
Popis: | Oxygen implantations with a fluence of 1×10 18 O + / cm 2 and energies of 300 and 400 keV were performed in titanium and molybdenum at temperatures between 300°C and 350°C. Chemical composition was investigated using Rutherford backscattering spectrometry (RBS) and TRIDYN simulations. Phase analysis by means of X-ray diffraction and morphology studies utilizing cross-sectional transmission electron microscopy (XTEM) were carried out. The formation of a buried MoO2 layer in molybdenum and a TiO layer in titanium could be observed. |
Databáze: | OpenAIRE |
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