Synthesis of buried metal oxide films by high fluence oxygen ion implantation into metals

Autor: B. Rauschenbach, C. Hammerl
Rok vydání: 2001
Předmět:
Zdroj: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 178:220-223
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(00)00464-x
Popis: Oxygen implantations with a fluence of 1×10 18 O + / cm 2 and energies of 300 and 400 keV were performed in titanium and molybdenum at temperatures between 300°C and 350°C. Chemical composition was investigated using Rutherford backscattering spectrometry (RBS) and TRIDYN simulations. Phase analysis by means of X-ray diffraction and morphology studies utilizing cross-sectional transmission electron microscopy (XTEM) were carried out. The formation of a buried MoO2 layer in molybdenum and a TiO layer in titanium could be observed.
Databáze: OpenAIRE